Formation of titanium nitride coatings by nitrogen plasma immersion ion implantation of evaporated titanium films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 6, 1996, Pages 3144-3146

  Hartmann, J ^a   Ensinger, W ^a   Koniger A ^a   Stritzker, B ^a   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030495904     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580183     Document Type: Article

References (9)

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