Preparation and characterization of a well-ordered surface on a Si(001) substrate with a buried metal layer for application of infrared reflection spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2263-2268

  Kobayashi, Yoshihiro ^a   Sumitomo, Koji ^a   Prabhakaran, Kuniyil ^a   Ogino, Toshio ^a  

^a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030508985     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580058     Document Type: Article

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