Local optical emission spectroscopy of excited species effused from an evaporation cell and a sputter source into dense plasmas - Basic studies for the deposition of thin gradient films

Fresenius' Journal of Analytical Chemistry

Volumn 355, Issue 3-4, 1996, Pages 247-249

  Bolt, H ^a   Hemel, V ^a   Koch, F ^a   Nickel, H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DEPOSITION; ELECTRIC ARCS; EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS;

EXPERIMENTAL STUDY; HOLLOW CATHODES; OPTICAL SPECTROMETRY; PROCEEDINGS;

PLASMA SOURCES;

EID: 0030375367     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s0021663550247     Document Type: Article

References (7)

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3. Hemel V, Bolt H, Koch F, Nickel H (1996) Fresenius J Anal Chem 355 (this issue)
4. Bolt H, Hemel V, Nickel H, Tanaka S (1995) Surf Coat Technol (in press)
5. Wiese WL, Smith MW, Miles BM (1969) Atomic transition probabilities. NSRDS-NBS 2, Washington
6. Striganov AR, Sventitskii (1968) Tables of spectral lines of neutral and ionized atoms. Plenum, New York
7. Brockhaus A, Borchardt D, Engemann J (1994) Plasma Sourc Technol 3 : 539-544