Uniform pyramid formation on alkaline-etched polished monocrystalline (100) silicon wafers

Progress in Photovoltaics: Research and Applications

Volumn 4, Issue 6, 1996, Pages 435-438

  Hylton, Jessica D ^a   Kinderman, Ronald ^a   Burgers, Antonius R ^a   Sinke, Wim C ^a   Bressers, Peter M M C ^b  

^a TNO   (Netherlands)

^b UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL POLISHING; ETCHING; REFLECTION; SINGLE CRYSTALS; SURFACE PROPERTIES; TEXTURES;

PYRAMID FORMATION;

SILICON WAFERS;

EID: 0030291713     PISSN: 10627995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-159X(199611/12)4:6<435::AID-PIP150>3.0.CO;2-5     Document Type: Article

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