Comparison between predicted strain values using elastic theory and experimental strain values for SiGeC alloy films grown on Si(001)

Materials Chemistry and Physics

Volumn 46, Issue 2-3, 1996, Pages 277-282

  Sego, S ^a   Culbertson, R J ^a   Bair, A E ^a   Alford, A L ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

Chemical vapour deposition; Elastic theory; Strain; Vegard's law

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPOSITION; EPITAXIAL GROWTH; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING ALUMINUM COMPOUNDS; STRAIN RATE; X RAY DIFFRACTION ANALYSIS;

ION CHANNELING ANGULAR SCANS; NUCLEAR RESONANCE ANALYSIS;

FILM GROWTH;

EID: 0030291470     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(96)01811-1     Document Type: Article

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