An X-ray diffraction study of the strain and structure of SiGeC/(100) Si alloys

Materials Chemistry and Physics

Volumn 46, Issue 2-3, 1996, Pages 283-287

  Bair, A E ^a   Alford, T L ^a   Sego, S ^a   Atzmon, Z ^a   Culbertson, R J ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

Strain; Vegard's law; X ray diffraction

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIFFRACTOMETERS; LATTICE CONSTANTS; STRAIN MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

PSEUDOMORPHIC FILMS; VEGARD'S LAW;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0030286679     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(96)01812-3     Document Type: Article

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