Nanolithography

Semiconductor Science and Technology

Volumn 11, Issue 11 SUPPL. S, 1996, Pages 1552-1557

  Ferry, D K ^a   Khoury, M ^a   Pivin Jr , D P ^a   Connolly, K M ^a   Whidden, T K ^a   Kozicki, M N ^a   Allee, D R ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ELECTRON DEVICES; EXPERIMENTS; FABRICATION; SCANNING;

NANOLITHOGRAPHY; SCANNING PROBE TECHNIQUE;

NANOTECHNOLOGY;

EID: 0030283421     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/11/11S/017     Document Type: Article

References (38)

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2. Bernstein G and Ferry D K 1986 Superlatt. Microstruct. 2 373 Ryan J, Han J, Kriman A, Ferry D K and Newman P 1989 Solid State Electron 32 1609 Han J, Ferry D K and Newman P IEEE Electron Device Lett. 11 209
3. Bernstein G and Ferry D K 1986 Superlatt. Microstruct. 2 373 Ryan J, Han J, Kriman A, Ferry D K and Newman P 1989 Solid State Electron 32 1609 Han J, Ferry D K and Newman P IEEE Electron Device Lett. 11 209
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8. See, for example, Chamberlain J M, Eaves L and Portal J-C 1990 Electronic Properties of Multilayers and Low-Dimensional Semiconductor Structures (New York: Plenum) Ferry D K, Barker J R and Jacoboni C 1991 Granular 'Nanoelectronics (New York: Plenum) Ferry D K, Grubin H L, Jacoboni C and Jauho A-P 1995 Quantum Transport in Ultrasmall Devices (New York: Plenum)
9. See, for example, Chamberlain J M, Eaves L and Portal J-C 1990 Electronic Properties of Multilayers and Low-Dimensional Semiconductor Structures (New York: Plenum) Ferry D K, Barker J R and Jacoboni C 1991 Granular 'Nanoelectronics (New York: Plenum) Ferry D K, Grubin H L, Jacoboni C and Jauho A-P 1995 Quantum Transport in Ultrasmall Devices (New York: Plenum)
10. See, for example, Chamberlain J M, Eaves L and Portal J-C 1990 Electronic Properties of Multilayers and Low-Dimensional Semiconductor Structures (New York: Plenum) Ferry D K, Barker J R and Jacoboni C 1991 Granular 'Nanoelectronics (New York: Plenum) Ferry D K, Grubin H L, Jacoboni C and Jauho A-P 1995 Quantum Transport in Ultrasmall Devices (New York: Plenum)
11. See, for example, Kelly M J and Weisbuch C (ed) 1986 The Physics and Fabrication of Microstructures and Microdevices (Berlin: Springer)
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25. Ma J, Puechner R A, Liu W-P, Mezenner R, Kriman A M, Maracas G N, Ferry D K, Chu P and Wieder H H 1989 Proc. InP and Related Compounds for Advanced Electrical and Optical Devices ed R Singh and L J Messick (Bellingham, WA: SPIE) (SPIE Proc. 1144 619) Ma J, Puechner R A, Kriman A M and Ferry D K 1990 Localization and Confinement of Electrons ed F Kuchar, H Heinrich and G Bauer (Berlin: Springer) p 268
26. Pivin D P Jr and Ferry D K Physica B at press
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35. Whidden T K, Allgair J, Ryan J M, Kozicki M N and Ferry D K 1995 J. Electrochem. Soc. 142 1199 Whidden T K, Allgair J, Jenkins-Gray A and Kozicki M N 1995 J. Vac. Sci. Technol. B 13 1337 Whidden T K, Allgair J, Jenkins-Gray A, Khoury M, Kozicki M N and Ferry D K 1995 Japan. J. Appl. Phys. 34 4420
36. Whidden T K, Allgair J, Ryan J M, Kozicki M N and Ferry D K 1995 J. Electrochem. Soc. 142 1199 Whidden T K, Allgair J, Jenkins-Gray A and Kozicki M N 1995 J. Vac. Sci. Technol. B 13 1337 Whidden T K, Allgair J, Jenkins-Gray A, Khoury M, Kozicki M N and Ferry D K 1995 Japan. J. Appl. Phys. 34 4420
37. Song H J, Rack M J, Abugharbieh K, Lee S Y, Khan V, Ferry D K and Allee D R 1994 J. Vac. Sci. Technol. B 12 3720
38. See, for example, Campbell P and Snow E S 1996 Semicond. Sci. Technol. 11 1558