Ion implanters for surface modification of metals

Surface and Coatings Technology

Volumn 84, Issue 1-3, 1996, Pages 557-562

  Torp, Bo ^a   Nielsen, Bjarne Roger ^a   Mikkelsen, Niels Jørgen ^b   Stræde, Christen A ^b  

^a Danfysik AS   (Denmark)

^b DANISH TECHNOLOGICAL INSTITUTE   (Denmark)

Author keywords

Ion implantation; Ion implanters; Surface modification

Indexed keywords

COMPUTER CONTROL; ION BEAMS; ION IMPLANTATION; ION SOURCES; METALS; NITROGEN; POSITION CONTROL;

BEAM POSITION CONTROL; ION IMPLANTERS; MAGNETIC SCANNING; MAGNETIC STEERING;

SURFACE TREATMENT;

EID: 0030269620     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(95)02732-7     Document Type: Article

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