A universal high-current implanter for surface modification of materials

Materials Science and Engineering A

Volumn 116, Issue C, 1989, Pages 193-196

  Nielsen, B R ^a   Abrahamsen, P ^a   Eriksen, S ^a  

^a Danfysik AS   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS--MEASUREMENTS; STEEL--ION IMPLANTATION; TRIBOLOGY;

HIGH-CURRENT IMPLANTER; HIGH-CURRENT MULTIPOLE REFLEX-DISCHARGE ION SOURCE (CHORDIS);

SURFACES;

EID: 0024719529     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5093(89)90145-7     Document Type: Article

References (10)

1. Metal beam production using a high current ion source
2. High-current metal-ion beams with energies up to 45 keV u−1