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Volumn 70, Issue 1-6 SPEC. ISS., 1996, Pages 352-363
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Optical properties of Si-rich SiO2 films in relation with embedded Si mesoscopic particles
a a
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KOBE UNIVERSITY
(Japan)
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Author keywords
Embedded Si particles; Optical properties; SiO2 films
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Indexed keywords
ABSORPTION SPECTROSCOPY;
ELECTRON MICROSCOPY;
INFRARED SPECTROSCOPY;
NANOSTRUCTURED MATERIALS;
OPTICAL PROPERTIES;
PHOTOLUMINESCENCE;
RAMAN SPECTROSCOPY;
SEMICONDUCTING BORON;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR DOPING;
SPUTTERING;
THIN FILMS;
PHOTOLUMINESCENCE SPECTROSCOPY;
SILICON MESOSCOPIC PARTICLES;
SEMICONDUCTING FILMS;
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EID: 0030259888
PISSN: 00222313
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-2313(96)00070-1 Document Type: Article |
Times cited : (85)
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References (26)
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