Error analysis of a multiwavelength dynamic flying height tester

IEEE Transactions on Magnetics

Volumn 32, Issue 5 PART 1, 1996, Pages 3720-3722

  Durân, Carlos A ^a  

^a Phase Metrics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ERROR ANALYSIS; ERROR CORRECTION; INTERFEROMETRY; LIGHT INTERFERENCE; MEASUREMENT ERRORS; OPTICAL PROPERTIES; PHASE SHIFT;

CALIBRATION ERRORS; FLYING HEIGHT MEASUREMENTS; LIGHT INTENSITY MEASUREMENT; MULTIWAVELENGTH DYNAMIC FLYING HEIGHT TESTER; SLIDER MATERIAL;

OPTICAL INSTRUMENTS;

EID: 0030245944     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.538815     Document Type: Article

References (4)

1. C. Lacey, "Method arid apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings", U.S. Patent #5,280,340; C. Lacey and E. Ross, Continuation in part of previous patent, U.S. Patent #5,457,534.
2. C. Lacey, R. Shclor, A. Cormier, and F.E. Talke, "Interferometric measurement of disk/slider spacing: the effect of phase shift on reflection", IEEE Trans. Mag. vol 29, No 6, 1993.
3. K.H. Womack, C.A. Durân and E.W. Ross, unpublished.
4. K.K. Luc, C. Lacey, and F.E. Talke, "Measurement of flying height with carbon overcoated sliders", unpublished, 1994 (white paper available from Phase Metrics).