Interferometric Measurement of Disk/Slider Spacing: The Effect of Phase Shift on Reflection

IEEE Transactions on Magnetics

Volumn 29, Issue 6, 1993, Pages 3906-3908

  Lacey, Christopher ^a   Shelor, Rick ^a   Cormier, A J ^a   Talke, F E ^b  

^a Phase Metrics Inc   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT; MAGNETIC HEADS; MEASUREMENTS; PHASE SHIFT; REFLECTION;

DISK SPACING; SLIDER SPACING;

INTERFEROMETRY;

EID: 0027697706     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.281338     Document Type: Article

References (7)

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2. Nigam, A., “A visible laser interferometer for air bearing separation measurement to submicron accuracy,” Trans. ASMEJ. Lub. Tech., p. 60, Jan. 1982.
3. Best, G. L., “Comparison of optical and capacitive measurements of slider dynamics,” IEEE Trans. Mag., Vol. Mag 23, No. 5, p. 3453, Sept. 1987.
4. Muranushi, F., Tanaka, K., and Takeuchi, Y., “Estimation of the Zero Spacing Error Due to a Phase Shift of Reflected Light in Measuring a Magnetic Head Slider’s Flying Height by Light Interference,” Adv. Info. Storage Syst., Vol. 4, p. 371, 1992.
5. Muller, R. H., “Definitions and conventions in ellipsometry,” Surface Science, Vol. 16, p. 14, 1969.
6. Bom, M. and Wolf, E., Principles of Optics, Pergamon Press, Oxford, 1989.
7. Anders, Thin Films in Optics, The Focal Press, London, 1965.