Generalized Lamb-wave multisensor

Ultrasonics Symposium Proceedings

Volumn 1, Issue , 1988, Pages 563-567

  Wenzel, S W ^a   Martin, B A ^a   White, R M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; INTEGRATED CIRCUIT MANUFACTURE; SEMICONDUCTING SILICON;

EVANESCENT DISTURBANCE; IN-PLANE TENSION; LAMB WAVE; MULTISENSOR; SILICON-BASED SENSOR;

SENSORS;

EID: 0024096762     PISSN: 00905607     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)