Nanofabrication of GaInAsP/InP 2-dimensional photonic crystals by a methane-based reactive ion beam etching

Physica B: Condensed Matter

Volumn 227, Issue 1-4, 1996, Pages 415-418

  Baba, Toshihiko ^a   Kamizawa, Naohisa ^a   Ikeda, Mitsutaka ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

GaInAsP InP; Photonic band; Photonic crystal; Reactive ion beam etching

Indexed keywords

ATOMS; ETCHING; ION BEAMS; NANOTECHNOLOGY; OPTIMIZATION; PHOTONS;

PHOTONIC BAND; PHOTONIC CRYSTALS; REACTIVE ION BEAM ETCHING;

CRYSTAL GROWTH;

EID: 0030234559     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-4526(96)00457-7     Document Type: Article

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