Interdigitated microelectrode arrays based on sputtered carbon thin-films

Sensors and Actuators, B: Chemical

Volumn 35, Issue 1-3, 1996, Pages 247-254

  Fiaccabrino, G C ^a   Tang, X M ^b   Skinner, N ^b   De Rooij, N F ^a   Koudelka Hep, M ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

Carbon thin films; Interdigitated microelectrode arrays; Microfabrication; Sputtering

Indexed keywords

ADHESION; CARBON; ELECTROCHEMISTRY; PLASMAS; SILICON; SILICON NITRIDE; SPECTROSCOPIC ANALYSIS; SPUTTER DEPOSITION; SURFACE TREATMENT; THIN FILMS;

CARBON THIN FILMS; INTERDIGITATED MICROELECTRODE ARRAYS (IDA); MICROFABRICATION;

MICROELECTRODES;

EID: 0030231909     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80063-9     Document Type: Article

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