Hybrid integration of eight channel PD-array on silica-based PLC using micro-mirror fabrication technique

Electronics Letters

Volumn 32, Issue 18, 1996, Pages 1662-1664

  Terui, H ^a   Shimokozono, M ^a   Yanagisawa, M ^a   Hashimoto, T ^a   Yamada, Y ^a   Horiguchi, M ^a  

^a NONE

Author keywords

Integrated optoelectronics; Photodiodes; Planar lightwave circuits

Indexed keywords

CLADDING (COATING); ELECTRON DEVICE MANUFACTURE; INTEGRATED CIRCUITS; INTEGRATED OPTOELECTRONICS; MIRRORS; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SILICA; SUBSTRATES; SURFACES;

MICRO MIRROR FABRICATION TECHNIQUE; PLANAR LIGHTWAVE CIRCUITS;

PHOTODIODES;

EID: 0030218346     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19961091     Document Type: Article

References (5)

1. YAMADA, Y., SUZUKI, S., MORIWAKI, K., HIBINO, Y., TOHMORI, Y., AKATSU, Y., NAKASUGA, Y., HASHIMOTO, T., TERUI, H., YANAGISAWA, M., INOUE, Y., AKAHORI, Y., and NAGASE, R.: 'Application of planar lightwave circuit platform to hybrid integrated optical WDM transmitter/receiver module', Electron. Lett., 1995, 31, pp. 1366-1367
2. MINO, S., YOSHINO, K., YAMADA, Y., TERUI, H., YASU, N., and MORIWAKI, K.: 'Planar lightwave circuit platform with coplanar waveguide for opto-electronic hybrid integration', J. Lightwave Technol. 1995, 13, pp. 2320-2326
3. CROOKES, C.G., CROSTON. I.R., and PESCOD, C.R.: 'Selfaligned integrated silica on silicon waveguide-photodiode interface', Electron. Lett., 1994, 30, pp. 1002-1003
4. MOORE, W.J.: 'Physical chemistry' (Prentice-Hall, Englewood Cliffs, NJ, 1962), 3rd edn.
5. NAKASUGA, Y., HASHIMOTO, T., YAMADA, Y., TERUL H., YANAGISAWA, M., MORIWAKI, K., AKAHORI, Y., TORMORI, Y., KATO, K., SEKINE, S., and HORIGUCHI, M.: 'Multi-chip hybrid integration on PLC platform using passive alignment technique', Proc. 46th Electronic Components & Technology Conf., Orlando, 1996. pp. 20-25