A new failure analysis technique using the thermo-electromotive force induced by laser irradiation

Quality and Reliability Engineering International

Volumn 12, Issue 4, 1996, Pages 253-257

  Mashiko, Y ^a,b,c   Koyama, T ^a   Koyama, H ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c JAPAN SOCIETY OF APPLIED PHYSICS   (Japan)

Author keywords

Aluminium; Failure analysis; Interconnect; OBIC; Thermo electromotive force; Void

Indexed keywords

ALUMINUM; CATHODE RAY TUBES; DEFECTS; ELECTRIC WIRING; HELIUM NEON LASERS; IMAGE PROCESSING; IRRADIATION; LASER BEAMS; LEAKAGE CURRENTS; LIGHT AMPLIFIERS; RELIABILITY; THERMOELECTRICITY;

ALUMINUM INTERCONNECTS; LASER IRRADIATION; OPTICAL BEAM INDUCED CURRENT; THERMO ELECTROMOTIVE FORCE; VOID;

FAILURE ANALYSIS;

EID: 0030197273     PISSN: 07488017     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-1638(199607)12:4<253::AID-QRE26>3.0.CO;2-D     Document Type: Article

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