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Volumn 35, Issue 4 B, 1996, Pages
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In situ mass and photoemission studies of fluorinated polyimide films irradiated with an electron beam
a
a
NTT CORPORATION
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRON BEAMS;
FILMS;
IRRADIATION;
MASS SPECTROMETRY;
PHOTOEMISSION;
REFRACTIVE INDEX;
SURFACE TREATMENT;
WAVEGUIDES;
X RAY PHOTOELECTRON SPECTROSCOPY;
ELECTRON BEAM IRRADIATION;
FLUORINATED POLYIMIDE FILMS;
IN SITU MASS ANALYSIS;
IN SITU PHOTOEMISSION;
POLYIMIDES;
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EID: 0030123665
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.35.l523 Document Type: Article |
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Times cited : (5)
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References (22)
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