Microbubble powered actuator

Transducers '91

Volumn , Issue , 1991, Pages 1041-1044

  Lin, Liwei ^a   Pisano, Albert P ^a   Lee, Abraham P ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; RESISTORS; SENSORS - SILICON SENSORS;

LINEAR BEAM THEORY; MICROBUBBLE-POWERED ACTUATOR; MICROCANTILEVER BEAM; POLYSILICON ACTUATOR PLATE;

ACTUATORS;

EID: 0026366613     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)