Diagnostics of direct-current-magnetron discharges by the emission-selected computer-tomography technique

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 10, Issue 4, 1992, Pages 1135-1139

  Miyake, S ^a   Shimura, N ^a   Makabe, T ^a   Itoh, A ^b  

^a KEIO UNIVERSITY   (Japan)

^b Tokuda Seisakusho ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21144480967     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578215     Document Type: Conference Paper

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