Geometrical and voltage resolution of electrical sampling scanning force microscopy

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 1994, Pages 1005-1008

  Mueller, Ulf ^a   Boehm, Christoph ^a   Sprengepiel, Joerg ^a   Roths, Christoph ^a   Kubalek, Erich ^a   Beyer, Adalbert ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC FIELDS; GEOMETRY; INTEGRATED CIRCUITS; PERMITTIVITY; SEMICONDUCTING GALLIUM ARSENIDE; VOLTAGE MEASUREMENT; WAVEGUIDES;

COPLANAR WAVEGUIDES; COULOMB FORCE; ELECTRICAL SAMPLING SCANNING FORCE MICROSCOPY; RIGOROUS FIELD THEORY; TIP SAMPLE INTERACTION; VOLTAGE RESOLUTION;

MICROSCOPIC EXAMINATION;

EID: 0028060931     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)