SIMOX research, development, and manufacturing

Journal of Electronic Materials

Volumn 25, Issue 1, 1996, Pages 93-97

  Allen, Lisa P ^a   Smick, Theodore H ^a   Ryding, Geoffrey ^a  

^a Ibis Technology Corp   (United States)

Author keywords

Manufacturing; Silicon on insulator; SIMOX

Indexed keywords

APPLICATIONS; MARKETING; SUBSTRATES;

INTERFACE SMOOTHNESS; MARKET EXPANSION; SIMOX; WAFER UNIFORMITY;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0029679197     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02666180     Document Type: Article

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