Simulation of Microstructure and Surface Profiles of Thin Films for VLSI Metallization

MRS Bulletin

Volumn 20, Issue 11, 1995, Pages 65-69

  Smy, T ^a   Dew, S K ^a   Brett, M J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SIMULATION LANGUAGES; ETCHING; FILM GROWTH; METALLIZING; MICROSTRUCTURE; NUCLEATION; SCANNING ELECTRON MICROSCOPY; SURFACE STRUCTURE; VLSI CIRCUITS;

FLUX SHADOWING; INTERCONNECTION; INTERFACIAL PHENOMENA; SURFACE DIFFUSION; SURFACE PROFILES;

THIN FILMS;

EID: 0029406366     PISSN: 08837694     EISSN: 19381425     Source Type: Journal    
DOI: 10.1557/S0883769400045619     Document Type: Article

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