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Journal of Micromechanics and Microengineering

Volumn 4, Issue 4, 1994, Pages 157-171

Microflow devices and systems

(2) Shoji, Shuchi a Esashi, Masayoshi a

a TOHOKU UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYZING MICROSYSTEMS; LIQUID DOSING MICROSYSTEMS; MICROFLOW DEVICES; MICROFLOW SENSORS; MICROPUMPS; MICROVALVES;

ACTUATORS; CONTROL EQUIPMENT; FLOW CONTROL; MICROMACHINING; SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0028698702 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/4/4/001 Document Type: Article

Times cited : (446)

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