Microshape and rough-surface analysis by fringe projection

Applied Optics

Volumn 33, Issue 31, 1994, Pages 7477-7488

  Leonhardt, Klaus ^a   Droste, Ulrich ^a   Tiziani, Hans J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Analysis; Fringe analysis; Fringe projecting microscopy; Microshape analysis; Noise; Resolution; Roughsurface; Surface sensor; Topometry

Indexed keywords

ANALYSIS; DIFFRACTION GRATINGS; IMAGING TECHNIQUES; INTERFEROMETRY; MICROSCOPIC EXAMINATION; SENSORS; SURFACE PROPERTIES;

FRINGE ANALYSIS; FRINGE PROJECTING MICROSCOPY; MICROSHAPE ANALYSIS; ROUGH SURFACE ANALYSIS; SURFACE SENSORS; TOPOMETRY;

OPTICAL VARIABLES MEASUREMENT;

EID: 0028546170     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.33.007477     Document Type: Article

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