Performance Limiting Micropipe Defects in Silicon Carbide Wafers

IEEE Electron Device Letters

Volumn 15, Issue 2, 1994, Pages 63-65

  Neudeck, Philip G ^a   Powell, J Anthony ^a  

^a NASA GLENN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; EPITAXIAL GROWTH; PERFORMANCE;

MICROPIPE DEFECTS; SILICON CARBIDE WAFERS;

SILICON CARBIDE;

EID: 0028380725     PISSN: 07413106     EISSN: 15580563     Source Type: Journal    
DOI: 10.1109/55.285372     Document Type: Article

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