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Volumn 56, Issue 15, 1990, Pages 1442-1444
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Growth of high quality 6H-SiC epitaxial films on vicinal (0001) 6H-SiC wafers
a a a b b b b c c |
Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0001072754
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.102492 Document Type: Article |
Times cited : (116)
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References (19)
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