GaAs piezoelectric modulated resistors for sensors

Transducers '91

Volumn , Issue , 1991, Pages 916-919

  Huang, Qing An ^a   Tong, Qin Yi ^a   Lu, Shi Ji ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL TECHNIQUES - TENSORS; PIEZOELECTRICITY; SEMICONDUCTING GALLIUM ARSENIDE - PIEZOELECTRIC EFFECTS; STRESSES;

CANTILEVER BEAM; ION IMPLANTATION TECHNOLOGY; PIEZOELECTRIC CHARGE DENSITY; PIEZOELECTRIC MODULATED RESISTORS; STRESS TENSOR;

RESISTORS;

EID: 0026372163     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)