Electromagnetic microactuators with multiple degrees of freedom

Transducers '91

Volumn , Issue , 1991, Pages 614-617

  Wagner, B ^a   Kreutzer, M ^a   Benecke, W ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; INTEGRATED CIRCUITS, MONOLITHIC; MAGNETS; METAL CUTTING - MICROMACHINING;

ELECTROMAGNETIC MICROACTUATORS; MICROMACHINED SILICON DEVICES; TORSIONAL ACTUATOR;

ACTUATORS;

EID: 0026400150     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)