Low-Pressure RF Discharge in the Free-Flight Regime

IEEE Transactions on Plasma Science

Volumn 20, Issue 2, 1992, Pages 86-92

  Kaganovich, Igor D ^a   Tsendin, Lev D ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRONS; MATHEMATICAL TECHNIQUES--APPROXIMATION THEORY;

ELECTRON PLASMA; RF DISCHARGES;

PLASMAS;

EID: 0026840985     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.134029     Document Type: Article

References (15)

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