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Volumn 30, Issue 1-2, 1992, Pages 149-155
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Polysilicon as a material for microsensor applications
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
DOPING (ADDITIVES);
PIEZOELECTRIC TRANSDUCERS;
PRESSURE TRANSDUCERS;
RESISTORS;
SEMICONDUCTING SILICON;
TEMPERATURE MEASURING INSTRUMENTS;
POLYSILICON;
PRESSURE SENSORS;
TEMPERATURE COEFFICIENT;
SILICON SENSORS;
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EID: 0026476186
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/0924-4247(92)80210-T Document Type: Article |
Times cited : (118)
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References (16)
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