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Volumn 30, Issue 1-2, 1992, Pages 149-155

Polysilicon as a material for microsensor applications

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); PIEZOELECTRIC TRANSDUCERS; PRESSURE TRANSDUCERS; RESISTORS; SEMICONDUCTING SILICON; TEMPERATURE MEASURING INSTRUMENTS;

EID: 0026476186     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(92)80210-T     Document Type: Article
Times cited : (118)

References (16)
  • 15
    • 0019871463 scopus 로고
    • Linearizing thermistors with a single resistor
    • (1981) Electronics , pp. 151-154
    • Burke1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.