TECHNOLOGY FOR INTEGRATED TRANSDUCERS.

Volumn , Issue , 1985, Pages 90-92

  Guckel, H ^a   Burns, D W ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS - APPLICATIONS; SENSORS - FABRICATION;

PIEZORESISTIVE READ-OUT; PRESSURE TRANSDUCER ARRAYS; VACUUM SEALING;

PRESSURE TRANSDUCERS;

EID: 0022285918     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)