|
Volumn , Issue , 1988, Pages 59-62
|
Surface-micromachining processes for electrostatic microactuator fabrication.
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ELECTRIC MOTORS;
HYDROFLUORIC ACID;
SILICA -- THIN FILMS;
SILICON AND ALLOYS -- ETCHING;
SILICON NITRIDE -- THIN FILMS;
ELECTRICAL ISOLATION LAYER;
ELECTROSTATIC MICROACTUATOR;
MICROMACHINING;
POLYSILICON THIN FILMS;
ROTARY VARIABLE-CAPACITANCE MICROMOTOR STRUCTURE;
ACTUATORS;
|
EID: 0024132423
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (51)
|
References (6)
|