메뉴 건너뛰기





Volumn , Issue , 1988, Pages 59-62

Surface-micromachining processes for electrostatic microactuator fabrication.

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MOTORS; HYDROFLUORIC ACID; SILICA -- THIN FILMS; SILICON AND ALLOYS -- ETCHING; SILICON NITRIDE -- THIN FILMS;

EID: 0024132423     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (51)

References (6)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.