SCOPUS 정보 검색 플랫폼

Volumn 37, Issue 1, 1988, Pages 519-522

Sub-Nanometre Surface Texture and Profile Measurement with NANOSURF 2

Author keywords

large dynamic range; low environmental susceptibility; Sub nanometre surface measurement; ultra precision slide

Indexed keywords

EID: 0000497284 PISSN: 00078506 EISSN: 17260604 Source Type: Journal
DOI: 10.1016/S0007-8506(07)61691-6 Document Type: Article

Times cited : (47)

References (6)

1
- 0022135381
- An optical system for measuring the profiles of supersmooth surfaces
- (1985) Precision Engineering , vol.7 , Issue.4 , pp. 211-215
- DOWNS¹ McGIVERN² FERGUSON³

2
- 0011852750
- X-ray optics
- (1977) Sci. Prog. Oxf. , vol.64 , pp. 371-422
- FRANKS¹

3
- 84914302997
- IKAWA N, SHIMADA S and MOROOKA H, 1987, “Nanoperformance of machine tool elements”. Proc 6th Int. Conf. on Prod. Eng. 64-69.

4
- 84914277390
- Precision machining in the manufacture of magnetic heads
- (1982) Bull. Japan. Soc of Prec Eng , vol.16 , Issue.1 , pp. 37-42
- KAMBAYASHI¹ NAKATA² MAKINO³

5
- 84975597501
- Thermal expansion and length stability of Zerodur in dependence on time and temperatures
- (1985) Applied Optics , vol.24 , Issue.20 , pp. 3330-3334
- LINDIG¹ PANNHORST²

6
- 0022134570
- The assessment of ultra smooth substrates and overcoatings
- (1986) Vacuum , vol.25 , Issue.10-11 , pp. 499-502
- LINDSEY¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.