Device Sensitivity of Field-Plated Poly silicon High-Voltage TFT’s and Their Application to Low-Voltage Operation

IEEE Electron Device Letters

Volumn 11, Issue 11, 1990, Pages 541-543

  Huang, Tiao Yuan ^a   Wu, I Wei ^a   Lewis, Alan G ^a   Chiang, Anne ^a   Bruce, Richard H ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; MICROELECTRONICS; SEMICONDUCTING SILICON;

HV TFT; POLYSILICON; THIN FILM TRANSISTORS;

TRANSISTORS, FIELD EFFECT;

EID: 0025521006     PISSN: 07413106     EISSN: 15580563     Source Type: Journal    
DOI: 10.1109/55.63026     Document Type: Article

References (8)

1. T. Y. Huang, I. W. Wu, A. G. Lewis, A. Chiang, and R. H. Brace, “A simpler 100-V polysilicon TFT with improved turn-on characteristics,” IEEE Electron Device Lett., 11, pp. 244–246, 1990.
2. T. C. Chuang, I. W. Wu, T. Y. Huang, and A. Chiang, “Page-wide high-voltage polysilicon TFT array for electronic printing,” in SID 90 Dig., pp. 508–511.
3. R. E. Proano, R. S. Misage, and D. G. Ast, “Development and electrical properties of undoped polycrystalline silicon thin film transistors,” IEEE Trans. Electron Devices, vol. 36, pp. 1915–1922, 1989.
4. L. Welsh, L. White, “NCAP displays; Optical switching and dielectric properties,” in SID 90 Dig., pp. 220–223.
5. R. Mach et al., “Comparing technologies for thin-film electroluminescent devices,” in SID 90 Dig., pp. 238–241.
6. T. Y. Huang et al., “A new implant-through-contact (ITC) high-voltage thin film transistor,” in Proc. Int. Electron Devices and Mater. Symp. (Taiwan), 1988, pp. 285–289.
7. J. G. Possum, A. Ortiz-Conde, H. Shichijo, and S. K. Banerjee, “Anomalous leakage current in LPCVD poly silicon MOSFET’s,” IEEE Trans. Electron Devices, vol. ED-32, pp. 1878–1884, 1985.
8. T. Y. Huang, I. W. Wu, A. G. Lewis, A. Chiang, and R. H. Bruce, “Polysilicon thin film transistors with field-plate-induced junction for both high-voltage and low-voltage applications,” presented at the 1990 IEEE SOS/SOI Technology Conf.