Highly accurate CD measurement with a micro standard

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3050, Issue , 1997, Pages 536-544

  Sasada, Katsuhiro ^a   Hashimoto, Nobuyoshi ^a   Mori, Hiroyoshi ^a   Ohtaka, Tadashi ^a  

^a HITACHI LTD   (Japan)

Author keywords

Accuracy; CD measurement; Micro standard; Micro scale; Scanning electron microscope

Indexed keywords

DATA STORAGE EQUIPMENT; INTERFEROMETERS; MEASUREMENTS; MICROSCOPES; PROCESS CONTROL; SCANNING; SCANNING ELECTRON MICROSCOPY; STANDARDS;

ACCURACY; CD-MEASUREMENT; MICRO STANDARD; MICRO-SCALE; SCANNING ELECTRON MICROSCOPE;

MEASUREMENT ERRORS;

EID: 0013449809     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.275945     Document Type: Conference Paper

References (5)

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