Issues for automation in semiconductor manufacturing

At-Automatisierungstechnik

Volumn 50, Issue 1, 2002, Pages 28-33

  Glüer, Detlev ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013371982     PISSN: 01782312     EISSN: None     Source Type: Journal    
DOI: 10.1524/auto.2002.50.1.028     Document Type: Article

References (10)

1. Abel, D.: Petri-Netze für Ingenieure - Modellbildung und Analyse diskret gesteuerter Systeme. Springer-Verlag, Berlin, 1990.
2. Azarm, K., Glüer, D. et al.: Autonomiebausteine eines mobilen Roboterfahrzeugs für Innenraumumgebungen. Informationstechnik und Technische Informatik: it+ti 36, 1 (1994), pp. 5-11.
3. Bader, U., Besler, A., Schliesser, J., Dorner, J.: A View to the Future - A Modular Simulation Kit for Cost-Efficient Fab-Wide Planning and the Simulation of Automated Material Handling Systems in the Semiconductor Industry. 10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 99). Sept. 8-10, 1999, Boston, USA, pp. 109-112.
4. Beschorner, A.: Entwicklung von Berechnungsverfahren zur Verfügbarkeitsanalyse eines verteilten Transportsystems. Diplomarbeit an der HTWK Leipzig, 2001.
5. Colvin, T., Hennessy, L. S., Mackulak, G. T.: Material Logistics, System Analysis, Design, Layout, and Simulation. Future Fab International 8 (2000), pp. 95-100.
6. Edgar, T. F. Campbell, W. J. et al.: Automatic Control in microelectronics manufacturing: Practices, challenges, and possibilities. Automatica 36 (2000), pp. 1567-1603.
7. Herzog, O., Mueller, J., Mueller, T.: Preconditions and Strategies for Successful Implementation of Advanced Process Control on a Large Scale, Semiconductor Fabtech, 13th edition (2001), pp. 83-87.
8. Johnston, M., Miller, G. et al.: Spike: Artificial Intelligence Scheduling for Hubble Space Telescope, Fifth Conference on Artificial Intelligence for Space Applications, May 22-23, 1990, Huntsville, USA, pp. 11-18.
9. Nägler, G., Stopp, F.: Graphen und Anwendungen, Teubner, Stuttgart 1996, 181 p.
10. Westphal, H., Gramlich, G.: Automation structure of a semiconductor fab using factory communications, 24th Annual Conference of the IEEE Industrial Electronics Society (IECON’98), Nov. 1998.