A view to the future-A modular simulation kit for cost-efficient fab-wide planning and the simulation of automated material handling systems in the semiconductor industry

10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, ASMC 1999

Volumn , Issue , 1999, Pages 109-112

  Bader, U ^a   Besler, A ^a   Schliesser, J ^a   Dorner, J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; MANUFACTURE; MATERIALS HANDLING; SEMICONDUCTOR DEVICE MANUFACTURE;

AUTOMATED MATERIAL HANDLING SYSTEMS; AUTOMATION SYSTEMS; COMPLEX PRODUCTION; DETAILED PLANNING; MODULAR SIMULATION; REASONABLY PRICED; SEMICONDUCTOR FABS; SEMICONDUCTOR INDUSTRY;

SUBSTRATES;

EID: 0013417888     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.1999.798193     Document Type: Conference Paper

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