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Volumn 365, Issue 1-3, 1999, Pages 158-162
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Surface and interface analysis of PVD Al-O-N and γ-Al2O3 diffusion barriers
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0013100255
PISSN: 09370633
EISSN: None
Source Type: Journal
DOI: 10.1007/s002160051464 Document Type: Article |
Times cited : (17)
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References (6)
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