Reactive d.c. magnetron sputter deposited Al2O3 films: Large-area coatings for industrial applications

Surface and Coatings Technology

Volumn 122, Issue 2-3, 1999, Pages 202-207

  Kharrazi Olsson, M ^a   MacAk K ^b   Graf, W ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Al2O3; Large area coatings; Reactive d.c. magnetron sputtering

Indexed keywords

COATING; DEPOSITION; SPUTTERING; STABILITY;

EID: 0012812949     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00378-3     Document Type: Article

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