Thin Films of Amorphous Silicon-Carbon Alloy Prepared by Radio-Frequency Magnetron Sputtering

Journal of the Electrochemical Society

Volumn 148, Issue 12, 2001, Pages

  Maruyama, Toshiro ^a   Sudoh, Hiroyuki ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012743917     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1416506     Document Type: Article

References (11)

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