Ion-assisted deposition of MoSx films from laser-generated plume under pulsed electric field

Journal of Applied Physics

Volumn 89, Issue 2, 2001, Pages 1449-1457

  Fominski, V Yu ^a   Nevolin, V N ^a   Romanov, R I ^a   Smurov, I ^b  

^a NATIONAL RESEARCH NUCLEAR UNIVERSITY MEPHI   (Russian Federation)

^b UNIVERSITÉ DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012185035     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1330558     Document Type: Article

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