Preparation, structure and properties of MoSx films

Thin Solid Films

Volumn 298, Issue 1-2, 1997, Pages 98-106

  Weise, G ^a   Mattern, N ^a   Hermann, H ^a   Teresiak, A ^a   Bacher I ^a   Bruckner W ^a   Bauer, H D ^a   Vinzelberg, H ^a   Reiss, G ^a   Kreissig, U ^b   Mader M ^b   Markschlager P ^c  

^a IFW DRESDEN   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c FRAUNHOFER INSTITUTE FOR MANUFACTURING ENGINEERING AND AUTOMATION IPA   (Germany)

Author keywords

Coatings; Molybdenum sulphide; Sputtering; X ray scattering

Indexed keywords

CARBON; CRYSTAL ATOMIC STRUCTURE; GRAIN SIZE AND SHAPE; HYDROGEN; MAGNETRON SPUTTERING; MOLYBDENUM COMPOUNDS; NANOSTRUCTURED MATERIALS; OXYGEN; STACKING FAULTS; STRESSES; TRIBOLOGY; WEAR RESISTANCE;

MOLYBDENUM SULFIDE; TARGET SUBSTRATE DISTANCE (TSA);

PROTECTIVE COATINGS;

EID: 0031118645     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09165-1     Document Type: Article

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