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Volumn 40, Issue 7, 2001, Pages 1126-1131
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Multilayer coatings for narrow-band imaging in the extreme ultraviolet
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Author keywords
[No Author keywords available]
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Indexed keywords
COATINGS;
DEGRADATION;
IMAGING TECHNIQUES;
MULTILAYER COATINGS;
ULTRAVIOLET RADIATION;
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EID: 0012157949
PISSN: 1559128X
EISSN: 21553165
Source Type: Journal
DOI: 10.1364/AO.40.001126 Document Type: Article |
Times cited : (15)
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References (10)
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