Process technology for monolithic high-speed Schottky/resonant tunneling diode logic integrated circuits

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3497-3501

  Lei, P M ^a   Subramaniam, S ^a   Bernstein, G H ^a   Williamson III, W ^b   Gilbert, B K ^b   Chow, D H ^c  

^a University of Notre Dame   (United States)

^b MAYO CLINIC   (United States)

^c Hughes Aircraft Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011778178     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588787     Document Type: Article

References (14)

1. D. H. Chow, J. N. Schulman, E. Özbay, and D. M. Bloom, Appl. Phys. Lett. 61, 1685 (1992).
2. S. K. Diamond, E. Özbay, M. J. W. Rodwell, D. M. Bloom, Y. C. Pao, and J. S. Harris, Appl. Phys. Lett. 54, 153 (1989).
3. E. R. Brown, J. R. Soderstrom, C. D. Parker, L. J. Mahoney, K. M. Molvar, and T. C. McGill, Appl. Phys. Lett. 58, 2291 (1991).
4. J. R. Soderstrom, D. H. Chow, and T. C. McGill, IEEE Electron Device Lett. 11, 27 (1990).
5. S. K. Diamond, E. Özbay, M. J. W. Rodwell, D. M. Bloom, Y. C. Pao, E. Wolak, and J. S. Harris, IEEE Electron Device Lett. 10, 104 (1989).
6. E. Özbay and D. M. Bloom, IEEE Electron Device Lett. 12, 480 (1991).
7. E. Özbay, D. M. Bloom, D. H. Chow, and J. N. Schulman, IEEE Electron Device Lett. 14, 400 (1993).
8. E. Özbay, D. M. Bloom, D. H. Chow, and J. N. Schulman, Proceedings of the 5th OAS Topical Meeting, Ultrafast Phenomena V, 1993 (unpublished), pp. 95-98.
9. D. H. Chow, J. N. Schulman, E. Özbay, D. M. Bloom, Proceedings of the Materials Research Society Conference, Boston, 1992 (unpublished).
10. High Speed Semiconductor Devices, edited by S. M. Sze (Wiley Interscience, New York, 1990), p. 255.
11. W. Williamson, S. Enquist, B. Gilbert, S. Subramaniam, P.-M. Lei, G. H. Bernstein, and D. H. Chow, IEEE J. Solid-State Circuits (unpublished).
12. D. Chow, H. L. Dunlap, W. Williamson, S. Enquist, B. Gilbert, S. Subramaniam, P.-M. Lei, and G. H. Bernstein, IEEE Electron Device Lett. 17, 69 (1996).
13. J. R. Soderstrom, D. H. Chow, and T. C. McGill, Appl. Phys. Lett. 55, 1094 (1989).
14. Y. H. Wang, M. H. Liu, M. P. Houng, J. F. Chen, and A. Y. Cho, IEEE Trans. Electron Devices 41, 1734 (1994).