Fabrication of DLC Films by Magnetron Sputtering of Sintered Diamond

New Diamond and Frontier Carbon Technology

Volumn 9, Issue 6, 1999, Pages 395-405

  Otake, Naoto ^a   Takama, Yasuyuki ^a   Takahashi, Tohru ^a   Kato, Kazunori ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Cluster; DLC; Hardness; Magnetron sputtering; Optical transmittance; Sintered diamond; Target material

Indexed keywords

EID: 0011182547     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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