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Volumn 176, Issue 1, 1997, Pages 51-55

Diamond-like carbon films deposited without deposition particles of large incidence angles by sputtering

Author keywords

Self shadowing effect; Sputtering; Thin films diamond like carbon; Ultra high hardness

Indexed keywords

AMORPHOUS FILMS; CARBON; HARDNESS; LOW TEMPERATURE OPERATIONS; PROTECTIVE COATINGS; SPUTTER DEPOSITION;

DIAMOND LIKE CARBON (DLC) FILMS; SELF SHADOWING EFFECT;

MAGNETIC THIN FILMS;

EID: 0031352294 PISSN: 03048853 EISSN: None Source Type: Journal
DOI: 10.1016/S0304-8853(97)00645-8 Document Type: Article

Times cited : (7)

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