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The microfactory system in national R&D project of MITI
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Tsukuba, Japan, December 7-9
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Electrochemical and optical processing of micro structures by scanning probe microscopy (SPM)
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San Diego, CA, USA, February 11-15
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M. Suda, K. Nakajima, K. Furuta, Y. Mitsuoka, T. Sakuhara, T. Ataka, Electrochemical and optical processing of micro structures by scanning probe microscopy (SPM), in: Proc. IEEE Int. Workshop on Micro Electro Mechanical Systems (MEMS '96), San Diego, CA, USA, February 11-15, 1996, pp. 296-300.
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Two-Dimensional Micro Conveyer
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Chicago, IL, USA, June 16-19
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Fiberscope-type environmental monitoring devices with binocular parallax accommodation mechanism for stereoscopic observation
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Nagoya, Japan, January 26-30
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H. Hosotani, S. Maeda, O. Tohyama, H. Itoh, Fiberscope-type environmental monitoring devices with binocular parallax accommodation mechanism for stereoscopic observation, in: Proc. IEEE Int. Workshop on Micro Electro Mechanical Systems (MEMS '97), Nagoya, Japan, January 26-30, 1997, pp. 400-405.
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Fiber-optic tactile microsensor for detecting the position of the tip of a fiberscope
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