Dose calibration for through-oxide doping distributions from time-dependent secondary-ion-mass-spectrometry depth profiles with only one sensitivity factor

Applied Physics Letters

Volumn 74, Issue 26, 1999, Pages 3969-3971

  Wittmaack, K ^a   Lee, J J ^b   Patel, S B ^c  

^a INSTITUTE OF EPIDEMIOLOGY   (Germany)

^b MOTOROLA INC   (United States)

^c Atomika Instruments GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010727449     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124239     Document Type: Article

References (12)

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