Localizing Heat-Generating Defects Using Fluorescent Microthermal Imaging

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 1996-November, Issue , 1996, Pages 55-62

  Tangyunyong, P ^a   Liang, A Y ^a   Righter, A W ^a   Barton, D L ^a   Soden, J M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA HANDLING; FILM PREPARATION; HEAT GENERATION; ION BEAMS; LIGHT SOURCES; SCANNING ELECTRON MICROSCOPY;

ANALYSIS TOOLS; FLUORESCENT MICROTHERMAL IMAGING; HEAT-GENERATING; MIXTURE FILMS; SAMPLE SURFACE; SIGNAL AVERAGING; TEMPERATURE DEPENDENT FLUORESCENCE; THERMAL RESOLUTION; THERMAL SENSITIVITY; UV-LIGHT;

FAILURE ANALYSIS;

EID: 0010619995     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31399/asm.cp.istfa1996p0055     Document Type: Conference Paper

References (12)

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